The Analysis of Elemental Composition and Depth Profiles of Nitride Nanostructured Coating Based on the TiHfVNbZr High-entropy Alloy
نویسندگان
چکیده
The elemental and structural features of the nitride nanostructured coating produced by vacuum arc evaporation from high-entropy cathode TiHfVNbZr were studied. Using of the complementary methods of elemental analysis (RBS, SIMS and GDMS) allowed to carry out a comprehensive analysis of the elemental composition, namely to determine the chemical composition of the surface layer, to establish the characteristics of the distribution of elements in depth and to identify uncontrollable impurities.
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